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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

157 nm 광리소그래피 위상 변위막 (SiONF)의 passivation 막으로서의 a-Si 박막의 광학적 특성 분석 및 SE 분석

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노광수researcher / 김성관 / 강명아 / 손정민
Publisher
한국재료학회
Issue Date
2002-01-01
Language
KOR
Citation

한국재료학회 추계학술발표

URI
http://hdl.handle.net/10203/136209
Appears in Collection
MS-Conference Papers(학술회의논문)
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