<110> 실리콘 기판상에 형성된 p+ Cantilever를 이용한 AFM Probe Tip의 제작
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 윤의식 | - |
| dc.date.accessioned | 2013-03-16T21:15:11Z | - |
| dc.date.available | 2013-03-16T21:15:11Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999 | - |
| dc.identifier.citation | MEMS 학술대회, v., no., pp.145 - 150 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/135947 | - |
| dc.language | KOR | - |
| dc.title | <110> 실리콘 기판상에 형성된 p+ Cantilever를 이용한 AFM Probe Tip의 제작 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 145 | - |
| dc.citation.endingpage | 150 | - |
| dc.citation.publicationname | MEMS 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 윤의식 | - |
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