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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Atomic Layer Deposition of Silicon Nitride Thin Film

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dc.contributor.authorPark, Chong-Ook-
dc.contributor.authorLee, Joo-Hyeon-
dc.contributor.authorKim, Hyuk-
dc.contributor.authorLee, Yeon-Seong-
dc.contributor.authorRha, Sa-Kyun-
dc.contributor.authorLee, Won-Jun-
dc.date.accessioned2013-03-16T20:24:47Z-
dc.date.available2013-03-16T20:24:47Z-
dc.date.created2012-02-06-
dc.date.issued2002-
dc.identifier.citationAVS Topical Conference ALD 2002, v., no., pp.P-14 --
dc.identifier.urihttp://hdl.handle.net/10203/135462-
dc.languageENG-
dc.titleAtomic Layer Deposition of Silicon Nitride Thin Film-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpageP-14-
dc.citation.publicationnameAVS Topical Conference ALD 2002-
dc.contributor.localauthorPark, Chong-Ook-
dc.contributor.nonIdAuthorLee, Joo-Hyeon-
dc.contributor.nonIdAuthorKim, Hyuk-
dc.contributor.nonIdAuthorLee, Yeon-Seong-
dc.contributor.nonIdAuthorRha, Sa-Kyun-
dc.contributor.nonIdAuthorLee, Won-Jun-
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MS-Conference Papers(학술회의논문)
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