Fabrication of PZT Thick Films on Silicon Substrates for Piezoelectric Actuator
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | No, Kwangsoo | - |
| dc.contributor.author | Jeon, Yong Bae | - |
| dc.contributor.author | Lee, Chang Ho | - |
| dc.date.accessioned | 2013-03-16T20:03:42Z | - |
| dc.date.available | 2013-03-16T20:03:42Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001-01-01 | - |
| dc.identifier.citation | The Second Korea-Switzerland Joint Symposium(New Materials and Process Issues in MEMS Technologies), v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/135295 | - |
| dc.language | ENG | - |
| dc.title | Fabrication of PZT Thick Films on Silicon Substrates for Piezoelectric Actuator | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | The Second Korea-Switzerland Joint Symposium(New Materials and Process Issues in MEMS Technologies) | - |
| dc.identifier.conferencecountry | Switzerland | - |
| dc.identifier.conferencecountry | Switzerland | - |
| dc.contributor.localauthor | No, Kwangsoo | - |
| dc.contributor.nonIdAuthor | Jeon, Yong Bae | - |
| dc.contributor.nonIdAuthor | Lee, Chang Ho | - |
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