A New Wide-Dimensional Floating Microstructure Fabrication Technology Using Laterally Anodized and Oxidized Porous Silicon as a Sacrificial Layer with Double Diffusion
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 한철희 | - |
| dc.date.accessioned | 2013-03-16T19:28:12Z | - |
| dc.date.available | 2013-03-16T19:28:12Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999 | - |
| dc.identifier.citation | 반도체 학술대회, v., no., pp.167 - 168 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/134938 | - |
| dc.language | KOR | - |
| dc.title | A New Wide-Dimensional Floating Microstructure Fabrication Technology Using Laterally Anodized and Oxidized Porous Silicon as a Sacrificial Layer with Double Diffusion | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 167 | - |
| dc.citation.endingpage | 168 | - |
| dc.citation.publicationname | 반도체 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 한철희 | - |
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