EPITAXIAL-GROWTH OF SOL-GEL PLZT THIN-FILMS

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Epitaxial lead lanthanum zirconate titanate [PLZT(9/50/50)] thin films were fabricated on various single crystal substrates using the spin coating of metallo-organic solutions. The films were heat-treated at 700 degrees C for 1 h using the direct insertion method. The films were epitaxially grown with (100), (100), and (110) being parallel to the SrTiO3(100), the MgO(100), and the sapphire (01 $($) over bar$$ 12) substrates, respectively. The epitaxy of the films was investigated using x-ray diffraction, pole figures, rocking curves, and scanning electron microscopy.
Publisher
MATERIALS RESEARCH SOCIETY
Issue Date
1994-02
Language
English
Article Type
Article
Citation

JOURNAL OF MATERIALS RESEARCH, v.9, no.2, pp.420 - 425

ISSN
0884-2914
URI
http://hdl.handle.net/10203/1318
Appears in Collection
MS-Journal Papers(저널논문)
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