DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chang, Hong-Young | - |
dc.contributor.author | Jeon, B | - |
dc.date.accessioned | 2013-03-16T12:19:02Z | - |
dc.date.available | 2013-03-16T12:19:02Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-07 | - |
dc.identifier.citation | 6th APCPST, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/131232 | - |
dc.language | ENG | - |
dc.publisher | APCPST | - |
dc.title | Plasma Characterization of 2, 27 MHz Dual Frequency Capacitively Coupled Plasma(CCP) | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 6th APCPST | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Jeon, B | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.