Performance Modeling of Cluster Tools using Timed Petri Nets
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shin, Yong-Ho | - |
| dc.contributor.author | Lee, Tae-Eog | - |
| dc.date.accessioned | 2013-03-16T11:16:51Z | - |
| dc.date.available | 2013-03-16T11:16:51Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999 | - |
| dc.identifier.citation | Semiconductor Manufacturing Operational Modeling and Simulation, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/130722 | - |
| dc.language | ENG | - |
| dc.title | Performance Modeling of Cluster Tools using Timed Petri Nets | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Semiconductor Manufacturing Operational Modeling and Simulation | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
| dc.contributor.nonIdAuthor | Shin, Yong-Ho | - |
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