Molecular resists based on t-butyl cholate Derivatives for 193nm photoresists
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Oh, Tae-Hwan | - |
| dc.contributor.author | Kwon, Young-Gil | - |
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2013-03-16T11:15:45Z | - |
| dc.date.available | 2013-03-16T11:15:45Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-10 | - |
| dc.identifier.citation | 한국고분자학회 2002년 추계학술대회 , v., no., pp.254 - 254 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/130715 | - |
| dc.language | ENG | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | Molecular resists based on t-butyl cholate Derivatives for 193nm photoresists | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 254 | - |
| dc.citation.endingpage | 254 | - |
| dc.citation.publicationname | 한국고분자학회 2002년 추계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Oh, Tae-Hwan | - |
| dc.contributor.nonIdAuthor | Kwon, Young-Gil | - |
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