Photobleaching Photoacid Generator for ArF Lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jang, Ji Hyun | - |
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2013-03-16T11:09:04Z | - |
| dc.date.available | 2013-03-16T11:09:04Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001-04 | - |
| dc.identifier.citation | 대한화학회 제87회 춘계총회, v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/130670 | - |
| dc.language | ENG | - |
| dc.publisher | 대한화학회 | - |
| dc.title | Photobleaching Photoacid Generator for ArF Lithography | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | 대한화학회 제87회 춘계총회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Jang, Ji Hyun | - |
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- CH-Conference Papers(학술회의논문)
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