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High-fidelity Modeling of MEMS resonators - Part 1: Anchor loss mechanisms through substrate Park, Yong-Hwa; Park, Kwangchun, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.13, no.2, pp.238 - 247, 2004-04 |
High-fidelity modeling of MEMS resonators - Part II: Coupled beam-substrate dynamics and validation Park, Yong-Hwa; Park, Kwangchun, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.13, no.2, pp.248 - 257, 2004-04 |
Measurement uncertainties in resonant characteristics of MEMS resonators Lee, Il; Lee, Jungchul, JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.27, no.2, pp.491 - 500, 2013-02 |
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