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A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways Hwang, J; Park, CH; Gao, W; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, v.47, no.7-8, pp.1053 - 1058, 2007-06 |
Estimation of 2D position and flatness errors for a planar XY stage based on measured guideway profiles Hwang, Jooho; Park, Chun-Hong; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.8, no.2, pp.64 - 69, 2007-04 |
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