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Electrical, thermal, and mechanical characterization of silicon microcantilever heaters Lee, Jungchul; Beechem, Thomas; Wright, Tanya L.; Nelson, Brent A.; Graham, Samuel; King, William P., JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.15, no.6, pp.1644 - 1655, 2006-12 |
Improved all-silicon microcantilever heaters with integrated piezoresistive sensing Lee, Jungchul; King, William P., JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.17, no.2, pp.432 - 445, 2008-04 |
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