Browse "Dept. of Mechanical Engineering(기계공학과)" by Subject MOEMS
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| An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on-insulator wafer Teo, Adrian J. T.; Li, Holden; Tan, Say Hwa; Yoon, Yong-Jin, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.27, no.6, 2017-06 |
| Three-dimensional imaging using fast micromachined electro-absorptive shutter Park, Yong-Hwa; Cho, Yong-Chul; You, Jang-Woo; Park, Chang-Young; Yoon, Hee-Sun; Lee, Sang-Hun; Kwon, Jong-Oh; et al, JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.12, no.2, 2013-04 |
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