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An Automatic Alignment Algorithm using Response Surface Method for Condenser Mirror Alignment of Soft X-ray Microscope Gweon, Dae-Gab; Kim, T; Kang, D; You, H; Kang, S; Youn, KH, XRM2005, 2005-11-03 |
Development of Algorithm for Automatic Alignment of Soft X-ray Microscope Condenser Mirror using Response Surface Method Kim, T; Kang, D; You, H; Kang, S; Gweon, Dae-Gab; Youn, KH, XRM2005, 2005-07-30 |
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