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Azimuth calibration method in ellipsometer with imaging spectrograph Chegal W.; Cho Y.J.; Kim H.J.; Cho H.M.; Lee Y.W.; Kim, Soohyun, Imaging Spectrometry X, v.5546, pp.400 - 405, 2004-08-02 |
Fast data acquisition in imaging ellipsometry using four frame method Chegal W.; Cho Y.J.; Cho H.M.; Lee Y.W.; Kim, Soohyun, Advanced Sensor Systems and Applications II, v.5634, pp.839 - 847, 2004-11-08 |
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