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Design of decoupled dual servo stage with voice coil motor and linear motor for XY long stroke uItra-precision scanning system Kim K.-H.; Choi Y.-M.; Gweon, Dae-Gab; Hong D.-P.; Kim K.-.S.; Lee S.; Lee M.-G., ICMIT 2005: Mechatronics, MEMS and Smart Materials, v.6040, 2005-09-20 |
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