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Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head Hong, Seong-Gu; Kirn, Minho; Lee, Soon-Bok; Lee, Chong Soo, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.17, pp.1155 - 1163, 2008-10 |
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