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3D Topographical Measurements of Thin Films by Spectrally-Resolved White-Light Interferometry Kim, Seung-Woo; Ghim, Y.S., ASPEN 2007, 2007 |
Dispersive white-light interferometry for thin-film thickness profile measurements Ghim, Y.S.; Kim, Seung-Woo, KAIST-NMIJ Joint Workshop 2006 on Precision Metrology, pp.22 -, 2006-12 |
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