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Very large scale phase measuring interferometry for profile measurement of aspheric surfaces with nanometer accuracy Kim, Seung-Woo; Chang In-Chul; Kim Dong-Sik; Kim Tae-Ho; Yoo Seung-Bong, Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99), v.1, pp.70 - 71, 1999-08-30 |
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