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Compensation of Parasitic Motion Errors in Translational Stage Based on Twyman-Green Interferometry Oh, JS; Bae, ED; Kim, Seung-Woo, JSPE, pp.433 - 434, 2004-06 |
Simultaneous Measurement and Compensation of 5-DOF Motion Errors Using Extended Twyman-Green Interferometry Oh, JS; Bae, ED; Kim, Seung-Woo, EUSPEN, pp.314 - 315, 2004-05-06 |
The Analysis and Compensation of 2D Position Error in Scanning Type XY Stage Oh, JS; Bae, ED; Kim, Seung-Woo, JSPE, pp.231 - 233, 2004-06 |
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