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Angstrom-accuracy multilayer thickness determination using optical metrology and machine learning Kwak,Hyunsoo; Ryu,Sungyoon; Cho, Suil; Kim, Junmo; Yang, Yusin; Kim, Jungwon, Optical Measurement Systems for Industrial Inspection XII 2021, SPIE, 2021-06 |
Non-destructive thickness characterisation of 3D multilayer semiconductor devices using optical spectral measurements and machine learning Kwak, Hyunsoo; Ryu, Sungyoon; Cho, Suil; Kim, Junmo; Yang, Yusin; Kim, Jungwon, Light: Advanced Manufacturing, v.2, no.1, pp.9 - 19, 2021-01 |
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