Browse "Dept. of Mechanical Engineering(기계공학과)" by Author Seo, Kyoung-Sun
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| A Bulk-micromachined Silicon Micromirror for Tunable Optical Switch Applications Seo, Kyoung-Sun; Cho, Young-Ho; Youn, Sung-Kie, Proc. IEEE 5th Inter. Conf. on Emerging Technologies and Factory Automation (ETFA '96), pp.404 - 407, 1996 |
| An Electrostatically-tunable Switching Micromirror using (110) Silicon Wafers Seo, Kyoung-Sun; Cho, Young-Ho; Youn, Sung-Kie, Tech. Dig. IEEE/LEOS 1996 Summer Topical Meetings: Optical MEMS and Their Applications, pp.41 - 42, 1996-08 |
| 실리콘의 이방성 식각 특성을 이용한 정전 구동형 초소형 거울의 개발 = Development of electrostatically-driven vertical micro mirrors using anisotropic silicon etchinglink 서경선; Seo, Kyoung-Sun; 윤성기; 조영호; et al, 한국과학기술원, 1996 |
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