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Non-destructive surface profile measurement of a patterned sample using acousto-optic tunable filter Kim, Soohyun; Kim, DS; Chegal, W; Kong, HJ; Lee,YW, SPIE proceedings, Characterization and Metrology for ULSI Technology, 2003 |
Non-destructive surface profile measurement of a thin film deposited on a patterned sample Kim, DS; Chegal, Won; Kim, Soohyun; Kong, HJ; Lee, YW, 2003 International Conference on Characterization and Metrology for ULSI Technology, pp.357 - 361, American Institute of Physics, 2003-09-30 |
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