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Finite element analysis of room temperature nanoimprint lithography process with rate dependent plasticity Song, Jung-Han; Huh, Hoon; Kim, Se-Ho; Han, Thomas H., PROGRESS ON ADVANCED MANUFACTURE FOR MICRO/NANO TECHNOLOGY 2005, PT 1 AND 2 BOOK SERIES: MATERIALS SCIENCE FORUM, v.505-507, no.3, pp.85 - 90, 2006 |
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