Showing results 3 to 4 of 4
Electrospun hydrogel nanoporous scaffold for cleaning ultrafine contaminants in semiconductor manufacturing Shin, Somin; Jung, Jihoon; Kim, Sanha, 2023 MRS Fall Meeting & Exhibit, Materials Research Society, 2023-11-27 |
Plasma etched vertically aligned carbon nanotube embedded polyurethane surface for precision semiconductor wafer polishing Kang, Sukkyung; Jung, Jihoon; Ryu, Hyunjun; Won, Dongyeon; Kim, Sanha, 2023 MRS Fall Meeting & Exhibit, Material Research Society(MRS), 2023-11-28 |
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