DSpace at KOASAS: Enhanced low-temperature crystallization of amorphous Si films using AlCl3 vapor

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Enhanced low-temperature crystallization of amorphous Si films using AlCl3 vapor

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Ahn, JH / Eom, Ji Hye / Ahn, Byung Tae researcher

Issue Date: 2001-04-16

Language: ENG

Citation: 2001 MRS Spring Meeting, v.685, pp.180 - 185

ISSN: 0272-9172

URI: http://hdl.handle.net/10203/129811

Appears in Collection: MS-Conference Papers(학술회의논문)

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