A Low Voltage 2-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, I.-J. | - |
| dc.contributor.author | Yun, K.-S. | - |
| dc.contributor.author | Lee, H.-K. | - |
| dc.contributor.author | Yoon, Jun-Bo | - |
| dc.contributor.author | Yoon, E. | - |
| dc.date.accessioned | 2013-03-16T08:31:52Z | - |
| dc.date.available | 2013-03-16T08:31:52Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-01 | - |
| dc.identifier.citation | IEEE 15th International MEMS Conference, v., no., pp.540 - 543 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/129400 | - |
| dc.language | ENG | - |
| dc.title | A Low Voltage 2-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 540 | - |
| dc.citation.endingpage | 543 | - |
| dc.citation.publicationname | IEEE 15th International MEMS Conference | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.nonIdAuthor | Cho, I.-J. | - |
| dc.contributor.nonIdAuthor | Yun, K.-S. | - |
| dc.contributor.nonIdAuthor | Lee, H.-K. | - |
| dc.contributor.nonIdAuthor | Yoon, E. | - |
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