A Low Voltage 2-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars

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dc.contributor.authorCho, I.-J.-
dc.contributor.authorYun, K.-S.-
dc.contributor.authorLee, H.-K.-
dc.contributor.authorYoon, Jun-Bo-
dc.contributor.authorYoon, E.-
dc.date.accessioned2013-03-16T08:31:52Z-
dc.date.available2013-03-16T08:31:52Z-
dc.date.created2012-02-06-
dc.date.issued2002-01-
dc.identifier.citationIEEE 15th International MEMS Conference, v., no., pp.540 - 543-
dc.identifier.urihttp://hdl.handle.net/10203/129400-
dc.languageENG-
dc.titleA Low Voltage 2-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage540-
dc.citation.endingpage543-
dc.citation.publicationnameIEEE 15th International MEMS Conference-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.nonIdAuthorCho, I.-J.-
dc.contributor.nonIdAuthorYun, K.-S.-
dc.contributor.nonIdAuthorLee, H.-K.-
dc.contributor.nonIdAuthorYoon, E.-
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EE-Conference Papers(학술회의논문)
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