The effects of Sr/Ti ratio on the step coverage of SrTiO3 thin films fabricated using ECR-PEMOCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, SY | ko |
| dc.contributor.author | Choi, J | ko |
| dc.contributor.author | No, Kwangsoo | ko |
| dc.date.accessioned | 2013-03-16T06:38:14Z | - |
| dc.date.available | 2013-03-16T06:38:14Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000-07-21 | - |
| dc.identifier.citation | 12th IEEE International Symposium on Applications of Ferroelectrics, pp.59 - 63 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/128469 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | The effects of Sr/Ti ratio on the step coverage of SrTiO3 thin films fabricated using ECR-PEMOCVD | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000171370100011 | - |
| dc.identifier.scopusid | 2-s2.0-0034470389 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 59 | - |
| dc.citation.endingpage | 63 | - |
| dc.citation.publicationname | 12th IEEE International Symposium on Applications of Ferroelectrics | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Honolulu, HI | - |
| dc.contributor.localauthor | No, Kwangsoo | - |
| dc.contributor.nonIdAuthor | Park, SY | - |
| dc.contributor.nonIdAuthor | Choi, J | - |
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