DSpace at KOASAS
College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

Electron Temperature control in ICP using grid and its use for control the ion ratio in CF4 / Ar plasma

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 421
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorBai, KH-
dc.contributor.authorHong, JI-
dc.contributor.authorKim, SS-
dc.contributor.authorChang, Hong-Young-
dc.date.accessioned2013-03-16T05:43:27Z-
dc.date.available2013-03-16T05:43:27Z-
dc.date.created2012-02-06-
dc.date.issued2000-
dc.identifier.citation53rd Annual Gaseous Electronic Conference, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/128047-
dc.languageENG-
dc.publisherAPS Physics-
dc.titleElectron Temperature control in ICP using grid and its use for control the ion ratio in CF4 / Ar plasma-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname53rd Annual Gaseous Electronic Conference-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorChang, Hong-Young-
dc.contributor.nonIdAuthorBai, KH-
dc.contributor.nonIdAuthorHong, JI-
dc.contributor.nonIdAuthorKim, SS-
Appears in Collection
PH-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0