TCP MOCVD TaN 박막증착 및 특성에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이원종 | - |
| dc.contributor.author | 박혜련 | - |
| dc.date.accessioned | 2013-03-16T05:32:22Z | - |
| dc.date.available | 2013-03-16T05:32:22Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000-05-01 | - |
| dc.identifier.citation | 한국재료학회 춘계학술발표대회, v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/127959 | - |
| dc.language | KOR | - |
| dc.title | TCP MOCVD TaN 박막증착 및 특성에 관한 연구 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | 한국재료학회 춘계학술발표대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 이원종 | - |
| dc.contributor.nonIdAuthor | 박혜련 | - |
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- MS-Conference Papers(학술회의논문)
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