DSpace at KOASAS
College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

High transmittance attenuated phase shifting mask of chromium aluminum oxynitride

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 346
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorChoi, E-
dc.contributor.authorKim, E-
dc.contributor.authorKim, H-
dc.contributor.authorKim, Y-
dc.contributor.authorTian, H-
dc.contributor.authorNo, Kwangsoo-
dc.date.accessioned2013-03-16T05:21:00Z-
dc.date.available2013-03-16T05:21:00Z-
dc.date.created2012-02-06-
dc.date.issued2001-10-03-
dc.identifier.citation21th Annual BACUS Symposium on Photomask Technology, v., no., pp.1141 - 1150-
dc.identifier.urihttp://hdl.handle.net/10203/127869-
dc.languageENG-
dc.titleHigh transmittance attenuated phase shifting mask of chromium aluminum oxynitride-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0035763429-
dc.type.rimsCONF-
dc.citation.beginningpage1141-
dc.citation.endingpage1150-
dc.citation.publicationname21th Annual BACUS Symposium on Photomask Technology-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorNo, Kwangsoo-
dc.contributor.nonIdAuthorChoi, E-
dc.contributor.nonIdAuthorKim, E-
dc.contributor.nonIdAuthorKim, H-
dc.contributor.nonIdAuthorKim, Y-
dc.contributor.nonIdAuthorTian, H-
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0