Simple fabrication method for vertical taper using tensile stress-induced mask and selective etching technique
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeon Soo-kun | - |
| dc.contributor.author | Kwon, Young Se | - |
| dc.date.accessioned | 2013-03-16T04:49:04Z | - |
| dc.date.available | 2013-03-16T04:49:04Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999-08-30 | - |
| dc.identifier.citation | Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99), v.2, no., pp.320 - 321 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/127592 | - |
| dc.language | ENG | - |
| dc.title | Simple fabrication method for vertical taper using tensile stress-induced mask and selective etching technique | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0033342701 | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 2 | - |
| dc.citation.beginningpage | 320 | - |
| dc.citation.endingpage | 321 | - |
| dc.citation.publicationname | Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99) | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kwon, Young Se | - |
| dc.contributor.nonIdAuthor | Jeon Soo-kun | - |
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