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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Simulation study and fabrication of high transmittance attenuated phase shifting mask

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dc.contributor.authorKim, Eun Ahko
dc.contributor.authorHong, Seung Bumko
dc.contributor.authorMoon, Seong-Yongko
dc.contributor.authorKim, Yong-Hoonko
dc.contributor.authorYoon, Hee-Sunko
dc.contributor.authorNo, Kwangsooko
dc.date.accessioned2013-03-16T04:18:56Z-
dc.date.available2013-03-16T04:18:56Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1999-09-15-
dc.identifier.citation19th Annual BACUS Symposium on Photomask Technology-
dc.identifier.urihttp://hdl.handle.net/10203/127390-
dc.languageEnglish-
dc.publisherSPIE-
dc.titleSimulation study and fabrication of high transmittance attenuated phase shifting mask-
dc.typeConference-
dc.identifier.wosid000086137100092-
dc.identifier.scopusid2-s2.0-0033345752-
dc.type.rimsCONF-
dc.citation.publicationname19th Annual BACUS Symposium on Photomask Technology-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationMonterey, CA, USA-
dc.contributor.localauthorNo, Kwangsoo-
dc.contributor.nonIdAuthorKim, Eun Ah-
dc.contributor.nonIdAuthorHong, Seung Bum-
dc.contributor.nonIdAuthorMoon, Seong-Yong-
dc.contributor.nonIdAuthorKim, Yong-Hoon-
dc.contributor.nonIdAuthorYoon, Hee-Sun-
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MS-Conference Papers(학술회의논문)
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