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College of Natural Sciences(자연과학대학)Dept. of Chemistry(화학과)CH-Conference Papers(학술회의논문)

Characterization of polysiloxane modified polysilsesquioxane films for low dielectric applications: Microstructure, electrical properties and mechanical properties

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dc.contributor.authorLee, Jingyu Hyeon-
dc.contributor.authorLyu, Yi Yeol-
dc.contributor.authorMah, Sang Kook-
dc.contributor.authorYim, JinHyeong-
dc.contributor.authorJeong, HyunDam-
dc.contributor.authorLee, Mong Sup-
dc.contributor.authorKim, Sang Youl-
dc.date.accessioned2013-03-16T04:05:14Z-
dc.date.available2013-03-16T04:05:14Z-
dc.date.created2012-02-06-
dc.date.issued2002-04-01-
dc.identifier.citationSilicon Materials - Processing, Characterization and Reliability, v.716, no., pp.337 - 342-
dc.identifier.issn0272-9172-
dc.identifier.urihttp://hdl.handle.net/10203/127271-
dc.languageENG-
dc.titleCharacterization of polysiloxane modified polysilsesquioxane films for low dielectric applications: Microstructure, electrical properties and mechanical properties-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0036951201-
dc.type.rimsCONF-
dc.citation.volume716-
dc.citation.beginningpage337-
dc.citation.endingpage342-
dc.citation.publicationnameSilicon Materials - Processing, Characterization and Reliability-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorKim, Sang Youl-
dc.contributor.nonIdAuthorLee, Jingyu Hyeon-
dc.contributor.nonIdAuthorLyu, Yi Yeol-
dc.contributor.nonIdAuthorMah, Sang Kook-
dc.contributor.nonIdAuthorYim, JinHyeong-
dc.contributor.nonIdAuthorJeong, HyunDam-
dc.contributor.nonIdAuthorLee, Mong Sup-
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CH-Conference Papers(학술회의논문)
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