DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Chong-Ook | - |
dc.date.accessioned | 2013-03-16T03:52:08Z | - |
dc.date.available | 2013-03-16T03:52:08Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002 | - |
dc.identifier.citation | MRS Spring meeting, v., no., pp.B4,9 - | - |
dc.identifier.uri | http://hdl.handle.net/10203/127176 | - |
dc.language | ENG | - |
dc.title | The Characteristics of Silicon Nitride Thin Film by Atomic Layer Deposition | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | B4,9 | - |
dc.citation.publicationname | MRS Spring meeting | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Park, Chong-Ook | - |
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