Arrays of binary and ternary particles and their replica pores on patterned microchannels

Abstract

Arrays of Binary and Ternary Particles and Their Replica Pores on Patterned Microchannels A novel method was developed for the assembly of patterned binary and ternary particle arrays and their inverted pore structures onto V-shaped microchannels that were fabricated by soft lithography. For the ternary particle arrays and their inverted pore structures, a dip-coating of binary particle mixture with a controlled size ratio and subsequent O(2) RIE were used.