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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Ru(EtCp)2 precursor를 이용하여 증착한 Ru 박막 특성 및 Ru precursor의 분해 특성 분석

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Publisher
한국재료학회
Issue Date
2002-01-01
Language
KOR
Citation

한국재료학회 추계학술발표

URI
http://hdl.handle.net/10203/126855
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MS-Conference Papers(학술회의논문)
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