Electrostatic digital micromirror using interdigitated cantilevers
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeon, J.-W. | ko |
| dc.contributor.author | Kim, B.-I. | ko |
| dc.contributor.author | Kim, J. | ko |
| dc.contributor.author | Lee, H. | ko |
| dc.contributor.author | Yoon, Jun-Bo | ko |
| dc.contributor.author | Yoon, E. | ko |
| dc.contributor.author | Lim, Koeng Su | ko |
| dc.date.accessioned | 2013-03-16T02:53:22Z | - |
| dc.date.available | 2013-03-16T02:53:22Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-01-20 | - |
| dc.identifier.citation | 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002, pp.528 - 531 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/126689 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | Electrostatic digital micromirror using interdigitated cantilevers | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000174908700129 | - |
| dc.identifier.scopusid | 2-s2.0-0036122204 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 528 | - |
| dc.citation.endingpage | 531 | - |
| dc.citation.publicationname | 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002 | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Las Vegas, NV | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.localauthor | Yoon, E. | - |
| dc.contributor.localauthor | Lim, Koeng Su | - |
| dc.contributor.nonIdAuthor | Jeon, J.-W. | - |
| dc.contributor.nonIdAuthor | Kim, B.-I. | - |
| dc.contributor.nonIdAuthor | Kim, J. | - |
| dc.contributor.nonIdAuthor | Lee, H. | - |
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