DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, DS | - |
dc.contributor.author | Chang, Hong-Young | - |
dc.date.accessioned | 2013-03-16T02:49:42Z | - |
dc.date.available | 2013-03-16T02:49:42Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2001-10 | - |
dc.identifier.citation | 54th Annual Gaseous Electronics Conference, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/126649 | - |
dc.language | ENG | - |
dc.title | Characteristics of a new high frequency inductively coupled plama source | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 54th Annual Gaseous Electronics Conference | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Lee, DS | - |
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