Fabrication and Characterization PZT/TiO2/SiO2/SiNx/SiO2/Si structure of Acousto-optic Device using Piezoelectric Film
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | No, Kwangsoo | - |
| dc.contributor.author | Lee, C | - |
| dc.contributor.author | Lee, CS | - |
| dc.contributor.author | Liu, J | - |
| dc.date.accessioned | 2013-03-15T23:50:21Z | - |
| dc.date.available | 2013-03-15T23:50:21Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000 | - |
| dc.identifier.citation | International Symposium on Integrated Ferroelectrics(ISIF), v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/125247 | - |
| dc.language | ENG | - |
| dc.publisher | ISIF | - |
| dc.title | Fabrication and Characterization PZT/TiO2/SiO2/SiNx/SiO2/Si structure of Acousto-optic Device using Piezoelectric Film | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | International Symposium on Integrated Ferroelectrics(ISIF) | - |
| dc.identifier.conferencecountry | Germany | - |
| dc.identifier.conferencecountry | Germany | - |
| dc.contributor.localauthor | No, Kwangsoo | - |
| dc.contributor.nonIdAuthor | Lee, C | - |
| dc.contributor.nonIdAuthor | Lee, CS | - |
| dc.contributor.nonIdAuthor | Liu, J | - |
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