Preparation and Electrical Properties of BST Thin Films Deposited by Liquid Source Misted Chemical Vapor Depositon(LSMCVD)액적화학증착법을 이용한 BST 박막의 제조 및 전기적 특성평가

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dc.contributor.author정현진-
dc.contributor.author최재형-
dc.contributor.author이정용-
dc.contributor.author우성일-
dc.date.accessioned2013-03-15T23:00:52Z-
dc.date.available2013-03-15T23:00:52Z-
dc.date.created2012-02-06-
dc.date.issued1997-10-01-
dc.identifier.citation한국화학공학회 추계학술발표회, v., no., pp. - 3129-
dc.identifier.urihttp://hdl.handle.net/10203/124855-
dc.description.abstract(Ba,Sr)TiO3(BST) thin films were grown on platinized Si wafer by LSMCVD. The electrical properties of BST films were investigated on Pt/SiO2/Si and Pt/Ti/SiO2/Si. BST thin films were deposited at room temperature and pressure of 700Torr followed by prebaking step at 240oC and baking step at 500oC. Top electrode with area of 1.24x10-3cm2 were fabricated by rf sputter-deposition of 100nm-thick Pt film on the BST film. The fabricated capacitors were postannealed at 750oC to increase the crystallinity. The dielectric constant of 212 and the leakage current densities of 5.8X10-7A/cm2 at +1.1V were achieved at the thickness of 115nm. The significant increase in leakage current and the short failure of BST thin films was arising from the formation of hillock of bottom electrode Pt, which was verified in the photographs of TEM, SEM, and AFM during heat treatment. Especially, the electric properties of BST films was improved by the various conditions of heat treatments(temperature, ambient gas).-
dc.languageENG-
dc.publisher한국화학공학회-
dc.titlePreparation and Electrical Properties of BST Thin Films Deposited by Liquid Source Misted Chemical Vapor Depositon(LSMCVD)-
dc.title.alternative액적화학증착법을 이용한 BST 박막의 제조 및 전기적 특성평가-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.endingpage3129-
dc.citation.publicationname한국화학공학회 추계학술발표회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor우성일-
dc.contributor.nonIdAuthor정현진-
dc.contributor.nonIdAuthor최재형-
dc.contributor.nonIdAuthor이정용-
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CBE-Conference Papers(학술회의논문)
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