저에너지 저 도즈의 산소 이온 주입에 의한 SIMOX SOI구조의 제조
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최시경 | - |
| dc.contributor.author | Kim, YP | - |
| dc.contributor.author | Bae,YH | - |
| dc.contributor.author | Kweon, YK | - |
| dc.contributor.author | Kim, YK | - |
| dc.contributor.author | Moon, DW | - |
| dc.date.accessioned | 2013-03-15T21:36:45Z | - |
| dc.date.available | 2013-03-15T21:36:45Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995 | - |
| dc.identifier.citation | 제2회 반도체 학술대회, v., no., pp.131 - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/124134 | - |
| dc.language | KOR | - |
| dc.title | 저에너지 저 도즈의 산소 이온 주입에 의한 SIMOX SOI구조의 제조 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 131 | - |
| dc.citation.publicationname | 제2회 반도체 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 최시경 | - |
| dc.contributor.nonIdAuthor | Kim, YP | - |
| dc.contributor.nonIdAuthor | Bae,YH | - |
| dc.contributor.nonIdAuthor | Kweon, YK | - |
| dc.contributor.nonIdAuthor | Kim, YK | - |
| dc.contributor.nonIdAuthor | Moon, DW | - |
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