DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Giwan | - |
dc.date.accessioned | 2013-03-15T21:08:13Z | - |
dc.date.available | 2013-03-15T21:08:13Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-04 | - |
dc.identifier.citation | IEEE/SEMI Advanced Semiconductor Manufacturing Conference (Boston) Proceeding, v., no., pp.186 - 191 | - |
dc.identifier.uri | http://hdl.handle.net/10203/123901 | - |
dc.language | ENG | - |
dc.publisher | IEEE | - |
dc.title | Cycle time improvement in manufacturing nitrided gate oxides for ULSI CMOS applications | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 186 | - |
dc.citation.endingpage | 191 | - |
dc.citation.publicationname | IEEE/SEMI Advanced Semiconductor Manufacturing Conference (Boston) Proceeding | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Yoon, Giwan | - |
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