DC Field | Value | Language |
---|---|---|
dc.contributor.author | Hong, IH | - |
dc.contributor.author | Seo, SH | - |
dc.contributor.author | Chang, Hong-Young | - |
dc.date.accessioned | 2013-03-15T20:01:25Z | - |
dc.date.available | 2013-03-15T20:01:25Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996 | - |
dc.identifier.citation | 43th International symp.American Vac. Soc, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/123335 | - |
dc.language | ENG | - |
dc.publisher | American Vacuum Society | - |
dc.title | Electron temperature control with grid in inductively coupled Ar plasma | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 43th International symp.American Vac. Soc | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Hong, IH | - |
dc.contributor.nonIdAuthor | Seo, SH | - |
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