Excimer Laser Photoresists Using Alicyclic Matrix Polymers
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.contributor.author | Jung, Min Ho | - |
| dc.contributor.author | Kim, Hyun-Woo | - |
| dc.contributor.author | Chun, Sung-Deuk | - |
| dc.date.accessioned | 2013-03-15T19:08:37Z | - |
| dc.date.available | 2013-03-15T19:08:37Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-08-04 | - |
| dc.identifier.citation | 36th IUPAC International Symposium on Macromolecules, v., no., pp.461 - 461 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/122804 | - |
| dc.language | ENG | - |
| dc.title | Excimer Laser Photoresists Using Alicyclic Matrix Polymers | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 461 | - |
| dc.citation.endingpage | 461 | - |
| dc.citation.publicationname | 36th IUPAC International Symposium on Macromolecules | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Jung, Min Ho | - |
| dc.contributor.nonIdAuthor | Kim, Hyun-Woo | - |
| dc.contributor.nonIdAuthor | Chun, Sung-Deuk | - |
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