DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Duk Yong | - |
dc.date.accessioned | 2013-03-15T17:58:46Z | - |
dc.date.available | 2013-03-15T17:58:46Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998 | - |
dc.identifier.citation | Proceedings of the 3rd Pacific Rim International Conference (PRICM-3), v., no., pp.2733 - 2738 | - |
dc.identifier.uri | http://hdl.handle.net/10203/122096 | - |
dc.language | ENG | - |
dc.title | The Effect of Electron Emission on The Roughness of Silicon Films in Catalytic CVD | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 2733 | - |
dc.citation.endingpage | 2738 | - |
dc.citation.publicationname | Proceedings of the 3rd Pacific Rim International Conference (PRICM-3) | - |
dc.contributor.localauthor | Yoon, Duk Yong | - |
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