DC Field | Value | Language |
---|---|---|
dc.contributor.author | 백경욱 | - |
dc.date.accessioned | 2013-03-15T16:30:27Z | - |
dc.date.available | 2013-03-15T16:30:27Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998-11-01 | - |
dc.identifier.citation | 한국재료학회 추계학술대회, v., no., pp.13 - 13 | - |
dc.identifier.uri | http://hdl.handle.net/10203/121319 | - |
dc.language | KOR | - |
dc.publisher | 한국재료학회 | - |
dc.title | Study on the reactive ion etching for via opening in multi-layer MCM-D substrate fabrication processes | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 13 | - |
dc.citation.endingpage | 13 | - |
dc.citation.publicationname | 한국재료학회 추계학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 백경욱 | - |
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