Integration of Solenoid-Type 3D Micro-Coils by 3D Photolithography and Electroplating
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김충기 | - |
| dc.date.accessioned | 2013-03-15T16:27:40Z | - |
| dc.date.available | 2013-03-15T16:27:40Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998 | - |
| dc.identifier.citation | 대한전기학회 MEMS 연구회 학술발표회, v., no., pp.93 - 99 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/121296 | - |
| dc.language | KOR | - |
| dc.title | Integration of Solenoid-Type 3D Micro-Coils by 3D Photolithography and Electroplating | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 93 | - |
| dc.citation.endingpage | 99 | - |
| dc.citation.publicationname | 대한전기학회 MEMS 연구회 학술발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김충기 | - |
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