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College of Natural Sciences(자연과학대학)Dept. of Chemistry(화학과)CH-Conference Papers(학술회의논문)

Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers

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dc.contributor.authorBok, Cheol Kyu-
dc.contributor.authorKoh, Cha-Won-
dc.contributor.authorBaik, Ki Ho-
dc.contributor.authorKim, Jin-Baek-
dc.contributor.authorJung, Min Ho-
dc.contributor.authorCheong, Jong-Ho-
dc.date.accessioned2013-03-15T15:14:25Z-
dc.date.available2013-03-15T15:14:25Z-
dc.date.created2012-02-06-
dc.date.issued1997-01-
dc.identifier.citationAdvances in Resist Technology and Processing XIV, v.3049, no., pp.501 - 511-
dc.identifier.urihttp://hdl.handle.net/10203/120642-
dc.languageENG-
dc.publisherSPIE-
dc.titleEnvironmentally stable chemically amplified positive resist containing vinyllactam terpolymers-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.volume3049-
dc.citation.beginningpage501-
dc.citation.endingpage511-
dc.citation.publicationnameAdvances in Resist Technology and Processing XIV-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorKim, Jin-Baek-
dc.contributor.nonIdAuthorBok, Cheol Kyu-
dc.contributor.nonIdAuthorKoh, Cha-Won-
dc.contributor.nonIdAuthorBaik, Ki Ho-
dc.contributor.nonIdAuthorJung, Min Ho-
dc.contributor.nonIdAuthorCheong, Jong-Ho-
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CH-Conference Papers(학술회의논문)
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